Thin-Film MOSFET-Based Pressure Sensor

MEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out

We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sen...

Piezoelectric Pressure Sensor Based on Enhanced Thin-Film PZT Diaphragm Containing Nanocrystalline Powders

ZrO2 thin-film-based sapphire fiber temperature sensor.

A submicrometer-thick zirconium dioxide film was deposited on the tip of a polished C-plane sapphire fiber to fabricate a temperature sensor that can work to an extended temperature range. Zirconium dioxide was selected as the thin film material to fabricate the temperature sensor because it has relatively close thermal expansion to that of sapphire, but more importantly it does not react appre...

DNA hybridization sensor based on pentacene thin film transistor.

A DNA hybridization sensor using pentacene thin film transistors (TFTs) is an excellent candidate for disposable sensor applications due to their low-cost fabrication process and fast detection. We fabricated pentacene TFTs on glass substrate for the sensing of DNA hybridization. The ss-DNA (polyA/polyT) or ds-DNA (polyA/polyT hybrid) were immobilized directly on the surface of the pentacene, p...

High Temperature Pressure Sensor Based on Thin Film Strain Gauges on Stainless Steel for Continuous Cylinder Pressure Control

This paper describes the design and performance of imes long-life high-temperature thin film strain gauge pressure sensors that have been specifically developed for monitoring of reciprocating compressors, natural gas or diesel engines, and high-pressure fuel systems. In a robust, durable, and low-cost design imes pressure sensors utilize the principle of thin film layers. Basis is a thin film ...